Jun 11, 2021 07:51 AM (GMT+8) · EqualOcean
Recently, Tokyo electron, a large Japanese semiconductor manufacturing equipment company, announced plans to supply a new generation of equipment to laboratories jointly operated by ASML in the Netherlands and IMEC in Belgium. Tokyo Electronics will provide "coating and developing equipment" for coating photosensitive agents on semiconductor wafers. This is the first time that Tokyo electronics has provided equipment to the laboratory. The device will be combined with the new generation of "EUV (extreme ultraviolet) lithography equipment" produced by ASML, which is a cutting-edge lithography equipment.