Jan 20, 2021 04:16 PM (GMT+8) · EqualOcean
In the application business, ASML delivered the first YieldStar 385 system to customers in the fourth quarter. YieldStar 385 has the latest measurement technology to improve the measurement speed and accuracy, which can meet the requirements of 3 nm process. Compared with the previous system, the main enhancements include faster workbench and faster wavelength switching, which can achieve high-precision registration measurement and equipment matching using multiple wavelengths.

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